A cikin masana'antar masana'anta na yau da kullun, plasma etcher da famfon turbomolecular sune mahimman mahimman fasaha guda biyu.Plasma etcher shine kayan aiki mai mahimmanci a cikin ƙirƙira abubuwan haɗin microelectronic, yayin da aka ƙera famfo turbomolecular don babban injin da sauri da sauri.A cikin wannan labarin, mun tattauna rawar da mahimmancin famfo turbomolecular a cikin etchers plasma.
Abun ciki
1. Ka'idar aiki na na'urar etching plasma
2. Ka'idar aiki na turbomolecular famfo
3. Aikace-aikace na turbomolecular famfo a cikin plasma etching inji
4. Abũbuwan amfãni da ƙayyadaddun farashin turbomolecular
5. Kammalawa
1. Ka'idar aiki na na'urar etching plasma:
Plasma etcher kayan aiki ne don sarrafa kayan aiki ta amfani da plasma a cikin ɗaki.Plasma tarin barbashi ne da aka yi caji ta hanyar iskar gas.Ana iya sarrafa yawa da alkiblar motsi na plasma ta babban mitar lantarki ko filayen maganadisu.A lokacin etching na plasma, wani plasma yana bugun saman kayan aiki kuma ya ɗaga shi ko ya lalata shi, yana haifar da tsarin da ake so.
Koyaya, ana haifar da iskar gas mai yawa yayin etching plasma.Waɗannan iskar gas ɗin sun haɗa da kayan aiki da ƙazanta a cikin iskar gas, da sauransu, waɗanda ke buƙatar fitar da su ta hanyar vacuum.Don haka, na'urar etching na plasma tana buƙatar ingantaccen tsarin vacuum don tabbatar da daidaito da daidaiton tsarin etching.
2. Ka'idar aiki na turbomolecular famfo:
Turbomolecular famfo su ne daya daga cikin mafi yawan amfani da babban famfo gudun famfo a cikin injin tsabtace tsarin.Yana aiki ta hanyar jujjuya saitin na'urori masu jujjuyawa masu saurin gudu don fitar da iskar gas daga ɗakin datti da fitar da iskar gas zuwa sararin samaniya.A cikin famfo mai turbomolecular, iskar gas ya fara shiga cikin famfo mai goyan baya inda aka matse shi zuwa wani yanki mai matsananciyar matsa lamba kafin a aika shi zuwa famfon turbomolecular.
A cikin famfo mai turbomolecular, ana fitar da iskar ta hanyar injin mai jujjuyawa, yayin da a cikin famfon kwayoyin iskar gas ya rushe zuwa kananan kwayoyin.Turbomolecular famfo iya samar da babban injin, da kuma yin famfo gudun iya isa 500 ~ 6000 L/s.Don injunan etching na plasma waɗanda ke buƙatar babban injin, famfunan turbomolecular wani yanki ne na dole.
3. Aikace-aikace na turbomolecular famfo a cikin plasma etching inji:
Ana amfani da famfunan turbomolecular sosai a cikin injunan etching na plasma.A cikin tsarin injin na'urar etching na plasma, ana amfani da famfo turbomolecular yawanci azaman babban famfo don taimakawa wajen cimma matsananciyar injin.Lokacin da plasma ya faɗo saman, yana samar da adadin iskar gas mai yawa, gami da ragowar albarkatun ƙasa da samfuran halayen sinadaran.Ana buƙatar fitar da waɗannan iskar gas ɗin da sauri da inganci don tabbatar da daidaito da amincin aikin etching na plasma.
Babban gudun famfo da kuma babban injin famfo na turbomolecular ya sa su zama famfo mai kyau.A cikin echer na plasma, ana sanya fam ɗin turbomolecular yawanci a cikin rukunin famfo daban don sauƙin sarrafa injin da matsa lamba.A lokaci guda kuma, don kare turbomolecular famfo, dole ne a shigar da wani Layer na famfo na inji da kuma matsa lamba rage bawul a gaban turbomolecular famfo don kauce wa wuce kima matsa lamba da kuma lalacewa ga turbomolecular famfo.
4. Abũbuwan amfãni da ƙayyadaddun farashin turbomolecular:
Turbomolecular pumps suna da fa'idodi da yawa, kamar babban saurin yin famfo, babban injin, ƙaramar amo, da babban abin dogaro.Babban gudun famfo na turbomolecular famfo zai iya ƙara yawan digiri, kuma a lokaci guda zai iya rage lokacin yin famfo, don haka ƙara yawan samar da kayan aiki.Ƙarƙashin ƙarar ƙararrawa da babban amincin famfo na turbomolecular shima yana ɗaya daga cikin fa'idodinsa, wanda ke nufin cewa injin turbomolecular zai iya kula da ingantaccen aiki na dogon lokaci, rage yawan kulawa da sauyawa.
Koyaya, famfunan turbomolecular suma suna da wasu iyakoki, kamar ƙarancin aikin famfo don wasu iskar gas.Misali, famfunan turbomolecular suna da ƙarancin haɓakar haɓakar hydrogen, kuma famfunan turbomolecular suma suna da wasu buƙatu don matsin iskar gas da zafin jiki.Sabili da haka, a cikin aikace-aikacen aikace-aikacen, ya zama dole don zaɓar nau'in da sigogin aiki na famfo turbomolecular bisa ga takamaiman yanayin don tabbatar da aikin al'ada da ingantaccen aiki.
5.Kammalawa:
A cikin tsarin masana'antar semiconductor, na'urar etching ta plasma tana ɗaya daga cikin mahimman kayan aiki.A cikin tsarin vacuum na na'urar etching na plasma, turbomolecular famfo, a matsayin babban famfo, yana taka muhimmiyar rawa wajen cimma babban vacuum da kwanciyar hankali tsarin etching plasma.Turbomolecular famfo suna da babban fanko gudun, high vacuum, low amo da ingantawa saduwa mafi girma fasaha bukatun.
Gabaɗaya magana, rawar turbomolecular famfo a cikin na'urar etching plasma ba za a iya maye gurbinsa ba.A cikin masana'antun masana'antu na semiconductor, famfo turbomolecular ya zama ɗaya daga cikin kayan aiki masu mahimmanci, wanda ke taka muhimmiyar rawa wajen tabbatar da aiki da kwanciyar hankali na na'urar etching plasma.Tare da ci gaba da ci gaba da ci gaban fasahar semiconductor, buƙatu da iyakokin amfani da famfunan turbomolecular za su ci gaba da faɗaɗa.Don haka, masana'antun famfo na turbomolecular suna buƙatar ci gaba da haɓaka aikin samfur da inganci don biyan buƙatun masana'antar masana'antar semiconductor don haɓaka aiki da ingantaccen kayan aiki.
Sanarwa na haƙƙin mallaka:
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Lokacin aikawa: Oktoba-20-2023