N'ime ụlọ ọrụ nrụpụta semiconductor nke taa, plasma etcher na mgbapụta turbomolecular bụ teknụzụ isi abụọ dị mkpa.Plasma etcher bụ ngwá ọrụ dị mkpa n'ịmepụta ihe ndị dị na microelectronic, ebe a na-emepụta mgbapụta turbomolecular maka oghere dị elu na ọsọ ọsọ ọsọ.N'isiokwu a, anyị na-atụle ọrụ na mkpa nke nfuli turbomolecular na etchers plasma.
Ọdịnaya
1. Ụkpụrụ na-arụ ọrụ nke igwe etching plasma
2. Ụkpụrụ na-arụ ọrụ nke mgbapụta turbomolecular
3. Ngwa nke mgbapụta turbomolecular na igwe etching plasma
4. Uru na njedebe nke nfuli turbomolecular
5. Nkwubi okwu
1. Ụkpụrụ na-arụ ọrụ nke igwe etching plasma:
Plasma etcher bụ ngwá ọrụ maka nhazi ihe site na iji plasma n'ime oghere oghere.Plasma bụ mkpokọta chaja nke ionization gas mepụtara.Enwere ike ijikwa njupụta na ntụzịaka nke ngagharị nke plasma site na mpaghara ọkụ eletrik dị elu ma ọ bụ magnetik.N'oge etching plasma, plasma na-adaba n'elu ihe na-arụ ọrụ ma bulie ya ma ọ bụ mebie ya, na-emepụta usoro a chọrọ.
Otú ọ dị, a na-emepụta nnukwu ikuku gas n'oge etching plasma.Ihe ndị a na-ekpochapụ gas na-agụnye ihe ndị na-arụ ọrụ na ihe ndị na-adịghị ọcha na gas, wdg, nke dị mkpa ka a wepụ ya site na usoro ikuku.Ya mere, igwe etching plasma chọrọ usoro ikuku na-arụ ọrụ nke ọma iji hụ na nkwụsi ike na izi ezi nke usoro etching.
2. Ụkpụrụ na-arụ ọrụ nke mgbapụta turbomolecular:
Nfuli turbomolecular bụ otu n'ime nfuli ọsọ ọsọ dị elu nke a na-ejikarị na sistemu agụụ.Ọ na-arụ ọrụ site n'ịtụgharị ihe ndị na-agbagharị agbagharị na-agba ọsọ dị elu iji wepụ gas ahụ n'ọnụ ụlọ na-ekpochapụ ma chụpụ gas n'ime ikuku.Na mgbapụta turbomolecular, gas na-ebu ụzọ abanye na mgbapụta nkwado ebe a na-agbanye ya n'ime mpaghara nrụgide dị elu tupu ezipụ ya na mgbapụta turbomolecular.
N'ime mgbapụta turbomolecular, a na-ebufe gas ahụ site na ihe na-agbagharị agbagharị, ebe n'ime mgbapụta molecular gas na-agbajikwa n'ime obere ụmụ irighiri ihe.Nfuli Turbomolecular nwere ike inye ohere dị elu, na ọsọ mgbapụta ha nwere ike iru 500 ~ 6000 L / s.Maka igwe etching plasma nke chọrọ oghere dị elu, nfuli turbomolecular bụ akụkụ dị mkpa.
3. Ngwa nke turbomolecular mgbapụta na plasma etching igwe:
A na-eji nfuli turbomolecular eme ihe na igwe etching plasma.N'ime usoro ikuku nke igwe etching plasma, a na-ejikarị mgbapụta turbomolecular eme ihe dị ka mgbapụta isi iji nyere aka nweta oghere dị elu.Mgbe plasma dara n'elu, ọ na-emepụta nnukwu gas na-ekpochapụ, gụnyere ihe ndị fọdụrụnụ na ngwaahịa mmeghachi omume kemịkal.Ọ dị mkpa ka ịpụpụ ikuku ndị a na-ekpochapụ n'ime oghere ngwa ngwa na nke ọma iji hụ na nkwụsi ike na ntụkwasị obi nke usoro etching plasma.
Ọsọ mgbapụta dị elu na oghere dị elu nke nfuli turbomolecular na-eme ka ha bụrụ nfuli dị mma.Na etcher plasma, a na-etinyekarị mgbapụta turbomolecular na mpaghara mgbapụta dị iche iche maka njikwa dị mfe nke oghere na nrụgide.N'otu oge ahụ, iji kpuchido mgbapụta turbomolecular, ọ dị mkpa iji wụnye oyi akwa nke mgbapụta igwe na nrụgide na-ebelata valvụ n'ihu mgbapụta turbomolecular iji zere nrụgide dị ukwuu na mmebi nke mgbapụta turbomolecular.
4. Uru na njedebe nke nfuli turbomolecular:
Nfuli turbomolecular nwere ọtụtụ uru, dị ka nnukwu ịgbapụta ọsọ, nnukwu agụụ, mkpọtụ dị ala, na ntụkwasị obi dị elu.Ịgba ọsọ dị elu nke mgbapụta turbomolecular nwere ike ịbawanye ogo agụụ, ma n'otu oge ahụ nwere ike belata oge mgbapụta, si otú ahụ na-abawanye mmepụta mmepụta.Obere mkpọtụ na ntụkwasị obi dị elu nke mgbapụta turbomolecular bụkwa otu n'ime uru ya, nke pụtara na mgbapụta turbomolecular nwere ike ịnọgide na-arụ ọrụ nke ọma ruo ogologo oge, na-ebelata ọnụ ọgụgụ nke nlekọta na ndochi.
Otú ọ dị, nfuli turbomolecular nwekwara ụfọdụ njedebe, dị ka obere mgbapụta arụmọrụ maka ụfọdụ gas.Dịka ọmụmaatụ, nfuli turbomolecular nwere obere mmịpụta nrụpụta maka hydrogen, na nfuli turbomolecular nwekwara ụfọdụ ihe achọrọ maka nrụgide gas na okpomọkụ.Ya mere, na ngwa ndị bara uru, ọ dị mkpa ịhọrọ ụdị na parampat na-arụ ọrụ nke mgbapụta turbomolecular dịka ọnọdụ a kapịrị ọnụ iji hụ na ọ na-arụ ọrụ nke ọma na nke ọma.
5.Mkpebi:
N'ime usoro nrụpụta semiconductor, igwe etching plasma bụ otu n'ime akụrụngwa dị oke mkpa.Na sistemu oghere nke igwe etching plasma, mgbapụta turbomolecular, dị ka mgbapụta isi, na-arụ ọrụ dị mkpa n'inweta oghere dị elu na usoro etching plasma kwụsiri ike.Nfuli Turbomolecular nwere nnukwu mgbapụta ọsọ ọsọ, oghere dị elu, mkpọtụ dị ala na njikarịcha iji zute ihe ndị chọrọ teknụzụ dị elu.
N'ikwu okwu n'ozuzu, ọrụ nke mgbapụta turbomolecular na igwe etching plasma bụ ihe a na-apụghị dochie anya.Na ụlọ ọrụ mmepụta ihe nke semiconductor, mgbapụta turbomolecular aghọwo otu n'ime ngwá ọrụ dị mkpa, nke na-arụ ọrụ dị mkpa n'ịhụ na arụmọrụ na nkwụsi ike nke igwe etching plasma.Site na mmepe na ọganihu nke teknụzụ semiconductor na-aga n'ihu, ọchịchọ na oke ojiji nke nfuli turbomolecular ga-aga n'ihu na-abawanye.Ya mere, ndị na-emepụta mgbapụta turbomolecular kwesịrị ịnọgide na-emeziwanye arụmọrụ ngwaahịa na ịdị mma iji gboo mkpa ụlọ ọrụ semiconductor maka ịrụ ọrụ dị elu yana akụrụngwa kwụsiri ike.
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