Indastering ea kajeno ea tlhahiso ea semiconductor, plasma etcher le turbomolecular pump ke mekhoa e 'meli ea bohlokoa ea theknoloji.Plasma etcher ke sesebelisoa sa bohlokoa ha ho etsoa likaroloana tsa microelectronic, ha pompo ea turbomolecular e etselitsoe bakeng sa vacuum e phahameng le lebelo le phahameng la ho pompa.Sehloohong sena, re tšohla karolo le bohlokoa ba lipompo tsa turbomolecular ho li-etcher tsa plasma.
Litaba
1. Molao-motheo oa ho sebetsa oa mochine oa etching oa plasma
2. Molao-motheo oa ho sebetsa oa pompo ea turbomolecular
3. Ts'ebeliso ea pompo ea turbomolecular mochine oa etching oa plasma
4. Melemo le mefokolo ea lipompo tsa turbomolecular
5. Qetello
1. Molao-motheo oa ho sebetsa oa mochini oa etching oa plasma:
Plasma etcher ke sesebelisoa sa ho lokisa lisebelisoa ka ho sebelisa plasma ka phaposing ea vacuum.Plasma ke pokello ea likaroloana tse qosoang tse hlahisoang ke ionization ea khase.Boima le tataiso ea motsamao oa plasma e ka laoloa ke matla a motlakase kapa a makenete a phahameng haholo.Nakong ea etching ea plasma, plasma e otla bokaholimo ba thepa e sebetsang ebe ea e phahamisa kapa ea e senya, e theha sebopeho se lakatsehang.
Leha ho le joalo, palo e kholo ea khase ea mouoane e hlahisoa nakong ea etching ea plasma.Likhase tsena tsa ho qeta li kenyelletsa lisebelisoa tsa ho sebetsa le litšila tse ka har'a khase, joalo-joalo, tse hlokang ho ntšoa ka sistimi ea vacuum.Ka hona, mochini oa etching oa plasma o hloka sistimi e sebetsang ea vacuum ho netefatsa botsitso le ho nepahala ha ts'ebetso ea etching.
2. Molao-motheo o sebetsang oa pompo ea turbomolecular:
Lipompo tsa turbomolecular ke e 'ngoe ea lipompo tsa lebelo le phahameng tse sebelisoang haholo lits'ebetsong tsa vacuum.E sebetsa ka ho ohla sete ea li-impellers tse potolohang ka lebelo le phahameng ho pompa khase ho tsoa phaposing ea vacuum le ho leleka khase sepakapakeng.Ka pompong ea turbomolecular, khase e qala ka ho kena pompong e tšehetsang moo e hatelloang sebakeng sa khatello e phahameng pele e romeloa pompong ea turbomolecular.
Ka pompong ea turbomolecular, khase e phunyeletsoa ka mochine o potolohang, ha pompong ea molek'hule khase e robeha ho limolek'hule tse nyenyane.Lipompo tsa turbomolecular li ka fana ka vacuum e phahameng, 'me lebelo la tsona la ho pompa le ka fihla ho 500 ~ 6000 L / s.Bakeng sa mechini e kenyang plasma e hlokang vacuum e phahameng, lipompo tsa turbomolecular ke karolo ea bohlokoahali.
3. Ts'ebeliso ea pompo ea turbomolecular mochining oa etching oa plasma:
Lipompo tsa turbomolecular li sebelisoa haholo mecheng ea etching ea plasma.Tsamaisong ea vacuum ea mochini oa etching oa plasma, pompo ea turbomolecular hangata e sebelisoa e le pompo e kholo ho thusa ho fihlela vacuum e phahameng.Ha plasma e otla ka holim'a metsi, e hlahisa khase e ngata ea mouoane, ho kopanyelletsa le masala a masala le lihlahisoa tsa lik'hemik'hale.Likhase tsena tsa mouoane li hloka ho pompeloa ka ntle ho phaposi ea vacuum kapele le ka nepo ho netefatsa botsitso le ts'epahalo ea ts'ebetso ea plasma etching.
Lebelo le phahameng la ho pompa le vacuum e phahameng ea lipompo tsa turbomolecular li li etsa lipompo tse loketseng.Ka plasma etcher, pompo ea turbomolecular e atisa ho behoa karolong e fapaneng ea pompo bakeng sa taolo e bonolo ea vacuum le khatello.Ka nako e ts'oanang, e le ho sireletsa pompo ea turbomolecular, hoa hlokahala ho kenya lera la pompo ea mochine le valve ea ho fokotsa khatello ka pel'a pompo ea turbomolecular ho qoba khatello e feteletseng le tšenyo ea pompo ea turbomolecular.
4. Melemo le mefokolo ea lipompo tsa turbomolecular:
Lipompo tsa turbomolecular li na le melemo e mengata, joalo ka lebelo le phahameng la ho pompa, vacuum e phahameng, lerata le tlase, le ts'epahalo e phahameng.Lebelo le phahameng la ho pompa la pompo ea turbomolecular le ka eketsa tekanyo ea vacuum, 'me ka nako e ts'oanang e ka fokotsa nako ea ho pompa, kahoo e eketsa katleho ea tlhahiso.Lerata le tlaase le ho tšepahala ho phahameng ha pompo ea turbomolecular le eona ke e 'ngoe ea melemo ea eona, e bolelang hore pompo ea turbomolecular e ka boloka ts'ebetso e sebetsang ka nako e telele, e fokotsa palo ea tlhokomelo le ho nkeloa sebaka.
Leha ho le joalo, lipompo tsa turbomolecular le tsona li na le mefokolo e itseng, joalo ka ts'ebetso e tlase ea ho pompa likhase tse itseng.Mohlala, lipompo tsa turbomolecular li na le ts'ebetso e tlase ea ho ntša haedrojene, 'me lipompo tsa turbomolecular le tsona li na le litlhoko tse itseng bakeng sa khatello ea khase le mocheso.Ka hona, lits'ebetsong tse sebetsang, hoa hlokahala ho khetha mofuta le maemo a sebetsang a pompo ea turbomolecular ho latela maemo a ikhethileng ho netefatsa ts'ebetso ea eona e tloaelehileng le e sebetsang.
5. Qetello:
Ts'ebetsong ea tlhahiso ea semiconductor, mochini o kenyang plasma ke e 'ngoe ea lisebelisoa tsa bohlokoa haholo.Sistimi ea vacuum ea mochini oa etching oa plasma, pompo ea turbomolecular, joalo ka pompo e kholo, e bapala karolo ea bohlokoa ho fihlelleng ts'ebetso e phahameng ea vacuum le ts'ebetso e tsitsitseng ea plasma etching.Lipompo tsa turbomolecular li na le lebelo le phahameng la ho pompa, vacuum e phahameng, lerata le tlase le ts'ebetso e ntle ho fihlela litlhoko tse phahameng tsa tekheniki.
Ka kakaretso, karolo ea pompo ea turbomolecular mochini oa etching ea plasma ha e khonehe.Ka indasteri ea tlhahiso ea semiconductor, pompo ea turbomolecular e fetohile e 'ngoe ea lisebelisoa tse hlokahalang, tse phethang karolo ea bohlokoa ho netefatsa ts'ebetso le botsitso ba mochine oa plasma etching.Ka nts'etsopele e tsoelang pele le tsoelopele ea theknoloji ea semiconductor, tlhokahalo le boholo ba tšebeliso ea lipompo tsa turbomolecular li tla tsoela pele ho hola.Ka hona, baetsi ba pompo ea turbomolecular ba hloka ho tsoela pele ho ntlafatsa ts'ebetso le boleng ba sehlahisoa ho fihlela tlhokahalo ea indasteri ea tlhahiso ea semiconductor bakeng sa ts'ebetso e phahameng le lisebelisoa tse tsitsitseng haholoanyane.
Tsebiso ea tokelo ea molao:
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Nako ea poso: Oct-20-2023