I loko o ka ʻoihana hana semiconductor o kēia lā, plasma etcher a me turbomolecular pump ʻelua mau ʻenehana koʻikoʻi.ʻO ka plasma etcher kahi mea hana pono i ka hana ʻana i nā ʻāpana microelectronic, aʻo kahi pahu turbomolecular i hoʻolālā ʻia no ka vacuum kiʻekiʻe a me ka wikiwiki pumping kiʻekiʻe.Ma kēia ʻatikala, kūkākūkā mākou i ke kuleana a me ka koʻikoʻi o nā pā turbomolecular i nā etchers plasma.
Maʻiʻo
1. Ke kumu hana o ka mīkini etching plasma
2. Ka loina hana o turbomolecular pauma
3. Ka hoʻohana ʻana i ka paila turbomolecular i ka mīkini etching plasma
4. ʻO nā pono a me nā palena o nā paila turbomolecular
5. Ka hopena
1. Ke kumu hana o ka mīkini etching plasma:
ʻO ka plasma etcher kahi mea hana no ka hoʻoponopono ʻana i nā mea ma o ka hoʻohana ʻana i ka plasma i loko o kahi keʻena vacuum.ʻO Plasma kahi hōʻiliʻili o nā ʻāpana i hoʻopaʻa ʻia i hana ʻia e ka ionization kinoea.Hiki ke hoʻomalu ʻia ke ʻano a me ke kuhikuhi o ka neʻe ʻana o ka plasma e nā māla uila a i ʻole magnetic.I ka wā etching plasma, hahau ka plasma i ka ʻili o ka mea hana a hoʻokiʻekiʻe a hoʻopau paha iā ia, e hana ana i ke ʻano i makemake ʻia.
Eia nō naʻe, hana ʻia ka nui o ke kinoea hoʻopau i ka wā etching plasma.Aia kēia mau kinoea hoʻopau i nā mea hana a me nā haumia i loko o ke kinoea, a me nā mea ʻē aʻe, pono e hoʻokuʻu ʻia ma o ka ʻōnaehana vacuum.No laila, pono ka mīkini etching plasma i kahi ʻōnaehana vacuum kūpono e hōʻoia i ka paʻa a me ka pololei o ke kaʻina hana etching.
2. Ke kumu hana o turbomolecular pauma:
ʻO nā pāpaʻi Turbomolecular kekahi o nā mea maʻamau i hoʻohana pinepine ʻia i nā ʻōmole wikiwiki kiʻekiʻe i nā ʻōnaehana vacuum.Hana ia ma ka wili ʻana i kahi pūʻulu o nā impellers rotating kiʻekiʻe e puhi i ke kinoea mai loko mai o ke keʻena ʻūhā a kipaku aku i ke kinoea i loko o ka lewa.I loko o ka pauma turbomolecular, komo mua ke kinoea i ka pauma hope kahi i hoʻokomo ʻia ai i loko o kahi ʻāpana kiʻekiʻe ma mua o ka hoʻouna ʻia ʻana i ka pauma turbomolecular.
I loko o ka pauma turbomolecular, hoʻoheheʻe ʻia ke kinoea ma o ka impeller kaʻapuni, ʻoiai i loko o ka pauma molecular e wāwahi ʻia ke kinoea i loko o nā molekole liʻiliʻi.Hiki i nā pumps turbomolecular ke hāʻawi i ka vacuum kiʻekiʻe, a hiki i kā lākou pumping wikiwiki ke hiki i 500 ~ 6000 L / s.No nā mīkini etching plasma e koi ana i ka vacuum kiʻekiʻe, ʻo nā paila turbomolecular kahi ʻāpana pono ʻole.
3. No ka hoʻohana ʻana i ka paila turbomolecular i ka mīkini etching plasma:
Hoʻohana nui ʻia nā paila Turbomolecular i nā mīkini etching plasma.I loko o ka ʻōnaehana hoʻoheheʻe o ka mīkini etching plasma, hoʻohana pinepine ʻia kahi pāpaʻi turbomolecular ma ke ʻano he pauma nui e kōkua ai i ka hoʻokō ʻana i ka ʻūhā kiʻekiʻe.Ke paʻi ka plasma i ka ʻili, hoʻopuka ia i ka nui o ke kinoea hoʻopau, me ke koena o nā mea maka a me nā huahana hopena kemika.Pono e hoʻokuʻu ʻia kēia mau kinoea hoʻopau i waho o ke keʻena vacuum me ka wikiwiki a me ka maikaʻi e hōʻoia i ka paʻa a me ka hilinaʻi o ke kaʻina etching plasma.
ʻO ke kiʻekiʻe kiʻekiʻe o ka hoʻomake ʻana a me ka nui o ka ʻuala o nā turbomolecular pumps e lilo lākou i mau pamu maikaʻi.I loko o ka plasma etcher, ua hoʻokomo pinepine ʻia ka pauma turbomolecular i loko o kahi ʻāpana pauma kaʻawale no ka maʻalahi o ka hoʻomalu ʻana i ka ʻōpala a me ke kaomi.I ka manawa like, i mea e pale ai i ka pauma turbomolecular, pono ia e hoʻokomo i kahi papa o ka mīkini mīkini a me kahi pahu hoʻohaʻahaʻa hoʻohaʻahaʻa i mua o ka pahu turbomolecular e pale aku ai i ka nui a me ka pōʻino i ka turbomolecular pump.
4. ʻO nā pono a me nā palena o nā paila turbomolecular:
He nui nā pōmaikaʻi o nā paila Turbomolecular, e like me ke kiʻekiʻe o ka pumping speed, kiʻekiʻe vacuum, haʻahaʻa haʻahaʻa, a me ka hilinaʻi kiʻekiʻe.Hiki i ke kiʻekiʻe pumping speed o ka turbomolecular pump ke hoʻonui i ka vacuum degree, a ma ka manawa like hiki ke hoʻemi i ka manawa pumping, a laila e hoʻonui ai i ka pono hana.ʻO ka haʻahaʻa haʻahaʻa a me ka hilinaʻi kiʻekiʻe o ka turbomolecular pump kekahi o kāna mau mea maikaʻi, ʻo ia hoʻi e hiki i ka turbomolecular pump ke mālama i ka hana kūpono no ka manawa lōʻihi, e hōʻemi ana i ka helu o ka mālama a me ka hoʻololi.
Eia nō naʻe, loaʻa i nā pamu turbomolecular kekahi mau palena, e like me ka haʻahaʻa haʻahaʻa o ka pumping no kekahi mau kinoea.No ka laʻana, he haʻahaʻa ka hoʻoemi ʻana o nā pumps turbomolecular no ka hydrogen, a ʻo nā pumps turbomolecular kekahi mau koi no ke kaomi kinoea a me ka mahana.No laila, i nā noi kūpono, pono e koho i ke ʻano a me nā ʻāpana hana o ka turbomolecular pump e like me ke kūlana kikoʻī e hōʻoia i kāna hana maʻamau a maikaʻi.
5. Ka hopena:
I ke kaʻina hana semiconductor, ʻo ka mīkini etching plasma kekahi o nā mea koʻikoʻi.I loko o ka ʻōnaehana vacuum o ka mīkini etching plasma, ʻo ka turbomolecular pump, ma ke ʻano he pauma nui, ke hana koʻikoʻi i ka hoʻokō ʻana i ke kaʻina hana etching plasma kiʻekiʻe a paʻa.He kiʻekiʻe ka pumping pumps turbomolecular pump, vacuum kiʻekiʻe, haʻahaʻa haʻahaʻa a me ka optimization e hoʻokō i nā koi ʻenehana kiʻekiʻe.
ʻO ka ʻōlelo maʻamau, ʻaʻole hiki ke hoʻololi ʻia ke kuleana o ka pā turbomolecular i ka mīkini etching plasma.I ka ʻoihana hana semiconductor, ua lilo ka turbomolecular pump i kekahi o nā mea pono e pono ai, kahi mea nui i ka hōʻoia ʻana i ka hana a me ka paʻa o ka mīkini etching plasma.Me ka hoʻomau mau ʻana a me ka holomua o ka ʻenehana semiconductor, e hoʻomau ka hoʻonui ʻana i ka noi a me ka nui o ka hoʻohana ʻana i nā paila turbomolecular.No laila, pono e hoʻomaikaʻi mau nā mea hana turbomolecular pump i ka hana huahana a me ka maikaʻi e hoʻokō i ka koi o ka ʻoihana semiconductor no ka hana kiʻekiʻe a me nā mea paʻa.
Hoʻolaha kope kope:
Kākoʻo ʻo GPM Intelligent Technology(Guangdong) Co., Ltd. i ka mahalo a me ka pale ʻana i nā kuleana waiwai naʻauao a hōʻike i ke kumu o nā ʻatikala me nā kumu maopopo.Inā ʻike ʻoe he kuleana kope a i ʻole nā pilikia ʻē aʻe i loko o ka ʻike o kēia pūnaewele, e ʻoluʻolu e kelepona mai iā mākou e hana me ia.ʻIke pili:marketing01@gpmcn.com
Ka manawa hoʻouna: Oct-20-2023