Kumzi mveliso wanamhlanje we-semiconductor, i-plasma etcher kunye nepompo ye-turbomolecular zimbini ezibalulekileyo zetekhnoloji.I-plasma etcher sisixhobo esibalulekileyo ekwenziweni kwezinto ezincinci ze-microelectronic, ngelixa ipompo ye-turbomolecular yenzelwe i-vacuum ephezulu kunye nesantya esiphezulu sokumpompa.Kule nqaku, sixoxa ngendima kunye nokubaluleka kweepompo ze-turbomolecular kwi-plasma etchers.
Umxholo
1. Umgaqo osebenzayo womatshini we-plasma etching
2. Umgaqo wokusebenza wepompo ye-turbomolecular
3. Ukusetyenziswa kwepompo ye-turbomolecular kumatshini we-plasma etching machine
4. Izinto eziluncedo kunye nokunciphisa iimpompo ze-turbomolecular
5. Isiphelo
1. Umgaqo osebenzayo womatshini wokufaka iplasma:
I-plasma etcher sisixhobo sokucubungula izinto ngokusebenzisa i-plasma kwigumbi lokucoca.I-Plasma yingqokelela yeenqununu ezihlawulisiweyo eziveliswa yi-ionization yegesi.Ubuninzi kunye nolwalathiso lwentshukumo yeplasma inokulawulwa ngumbane we-frequency ephezulu okanye imagnethi.Ngexesha lokucoca i-plasma, i-plasma ibetha umphezulu wezinto zokusebenza kwaye iyiphakamise okanye iyichithe, idala isakhiwo esifunwayo.
Nangona kunjalo, isixa esikhulu segesi yokukhupha iveliswa ngexesha lokufakwa kweplasma.Ezi gesi zokukhupha ziquka izinto zokusebenza kunye nokungcola kwigesi, njl., ekufuneka zikhutshwe nge-vacuum system.Ngoko ke, umatshini wokucoca i-plasma udinga inkqubo yokucoca esebenzayo ukuqinisekisa ukuzinza kunye nokuchaneka kwenkqubo yokubhala.
2. Umgaqo osebenzayo wempompo ye-turbomolecular:
Iimpompo ze-Turbomolecular sesinye sezona zixhaphakileyo iimpompo zesantya sokumpompa eziphezulu kwiinkqubo zokufunxa.Isebenza ngokujikeleza iseti yee-impellers ezijikelezayo ezinesantya esiphezulu ukumpompa irhasi ngaphandle kwegumbi lokucoca kwaye ikhuphele irhasi emoyeni.Kwimpompo ye-turbomolecular, igesi ingena kuqala kwimpompo exhasayo apho ixinzelelwe kwindawo yoxinzelelo oluphezulu ngaphambi kokuba ithunyelwe kwipompo ye-turbomolecular.
Kwimpompo ye-turbomolecular, igesi iphonswa nge-impeller ejikelezayo, ngelixa kwipompo ye-molecular igesi idilizwe ibe ngama-molecule amancinci.Iipompo ze-Turbomolecular zinokubonelela nge-vacuum ephezulu, kwaye isantya sabo sokupompa sinokufikelela kwi-500 ~ 6000 L / s.Kumatshini wokufaka iplasma efuna ivacuum ephezulu, iimpompo ze-turbomolecular ziyinxalenye eyimfuneko.
3. Ukusetyenziswa kwempompo ye-turbomolecular kwi-plasma etching machine:
Iimpompo ze-Turbomolecular zisetyenziswa ngokubanzi koomatshini be-plasma etching.Kwinkqubo yokucoca umatshini we-plasma etching, ipompo ye-turbomolecular idla ngokusetyenziswa njengempompo ephambili yokunceda ukufezekisa i-vacuum ephezulu.Xa iplasma ibetha umphezulu, ivelisa isixa esikhulu segesi yokukhupha, kubandakanywa izinto ezishiyekileyo ezikrwada kunye neemveliso zokusabela kweekhemikhali.Ezi gesi ezikhuphayo kufuneka zikhutshwe ngaphandle kwegumbi lokucoca ngokukhawuleza kwaye ngokufanelekileyo ukuqinisekisa ukuzinza kunye nokuthembeka kwenkqubo ye-plasma etching.
Isantya esiphezulu sokumpompa kunye ne-vacuum ephezulu yeepompo ze-turbomolecular zizenza iimpompo ezifanelekileyo.Kwi-plasma etcher, ipompo ye-turbomolecular idla ngokufakwa kwiyunithi yempompo eyahlukileyo ukuze kube lula ukulawula i-vacuum kunye noxinzelelo.Ngexesha elifanayo, ukwenzela ukukhusela ipompo ye-turbomolecular, kuyimfuneko ukufaka umaleko wempompo yomatshini kunye ne-valve yokunciphisa uxinzelelo phambi kwepompo ye-turbomolecular ukuphepha uxinzelelo olugqithiseleyo kunye nomonakalo kwipompo ye-turbomolecular.
4. Izinto eziluncedo kunye nokunciphisa iimpompo ze-turbomolecular:
Iimpompo zeTurbomolecular zineengenelo ezininzi, ezinje ngesantya sokumpompa okuphezulu, ivacuum ephezulu, ingxolo ephantsi, kunye nokuthembeka okuphezulu.Isantya esiphezulu sokupompa ipompo ye-turbomolecular inokunyusa i-vacuum degree, kwaye kwangaxeshanye inokunciphisa ixesha lokupompa, ngaloo ndlela inyusa ukusebenza kakuhle kwemveliso.Ingxolo ephantsi kunye nokuthembeka okuphezulu kwepompo ye-turbomolecular nayo enye yeenzuzo zayo, oku kuthetha ukuba ipompo ye-turbomolecular inokugcina ukusebenza ngokufanelekileyo ixesha elide, ukunciphisa inani lokugcinwa kunye nokutshintshwa.
Nangona kunjalo, iimpompo ze-turbomolecular zikwanazo ezinye izithintelo, ezifana nokumpompa okuphantsi kokusebenza kakuhle kwiigesi ezithile.Umzekelo, iimpompo ze-turbomolecular zine-low extraction esebenzayo ye-hydrogen, kwaye iimpompo ze-turbomolecular nazo zineemfuno ezithile zoxinzelelo lwegesi kunye nobushushu.Ngoko ke, kwizicelo eziphathekayo, kuyimfuneko ukukhetha uhlobo kunye neeparitha zokusebenza zepompo ye-turbomolecular ngokwemeko ethile ukuqinisekisa ukusebenza kwayo okuqhelekileyo kunye nokusebenza kakuhle.
5. Isiphelo:
Kwinkqubo yokuvelisa i-semiconductor, umatshini wokufaka iplasma sesinye sezixhobo ezibaluleke kakhulu.Kwinkqubo yokucoca umatshini we-plasma etching, ipompo ye-turbomolecular, njengempompo ephambili, idlala indima ebalulekileyo ekufezekiseni i-vacuum ephezulu kunye nenkqubo ezinzileyo ye-plasma etching.Iimpompo ze-Turbomolecular zinesantya esiphezulu sokumpompa, i-vacuum ephezulu, ingxolo ephantsi kunye nokulungiswa ukuhlangabezana neemfuno eziphezulu zobuchwepheshe.
Ngokubanzi, indima yempompo ye-turbomolecular kumatshini wokufaka iplasma ayinakuphinda ithathelwe indawo.Kwishishini lokuvelisa i-semiconductor, ipompo ye-turbomolecular ibe yenye yezixhobo eziyimfuneko, edlala indima ebalulekileyo ekuqinisekiseni ukusebenza kunye nokuzinza komatshini we-plasma etching.Ngophuhliso oluqhubekayo kunye nenkqubela phambili yetekhnoloji ye-semiconductor, imfuno kunye nobubanzi bokusetyenziswa kweepompo ze-turbomolecular ziya kuqhubeka nokwandisa.Ke ngoko, abavelisi bempompo ye-turbomolecular kufuneka baqhubeke bephucula ukusebenza kwemveliso kunye nomgangatho wokuhlangabezana nemfuno yomzimveliso we-semiconductor yokusebenza okuphezulu kunye nezixhobo ezizinzileyo.
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Ixesha lokuposa: Oct-20-2023