Isingeniso somqondo oyisisekelo, isimiso sokusebenza kanye nezinkambu zokusetshenziswa kwe-Wafer Chuck

I. Umqondo oyisisekelo we-wafer chuck

A. Incazelo ye-wafer chuck
I-Wafer chuck iyithuluzi elisetshenziselwa ukugoqa amawafa e-silicon, amafilimu amancanyana nezinye izinto ukuze kuqinisekiswe ukuzinza nokunemba kwawo ngesikhathi sokucutshungulwa.Ivamise ukuqukatha izinto zokubamba, izindawo zokubeka indawo, kanye nezilungisi, ezingabamba futhi zibeke amawafa e-silicon namafilimu anobukhulu obuhlukahlukene, ukwakheka, nezinto zokwakha.

B. Ukusetshenziswa kwe-wafer chuck
Ama-wafer chucks asetshenziswa kakhulu ekukhiqizeni ama-semiconductor, ukucubungula optical, ukukhiqizwa kwephaneli eyisicaba, ukukhiqizwa kwamaphaneli elanga, i-biomedicine nezinye izinkambu zokubopha nokubeka ama-silicon wafers, amafilimu amancanyana nezinye izinto zokuqinisekisa ukuzinza nokuzinza kwazo ngesikhathi sokucubungula ukunemba.

C. Izinhlobo ze-wafer chuck

Ngokwezimo ezihlukene zokusebenzisa kanye nezidingo, i-wafer chuck ingahlukaniswa ngohlobo lwe-clamping lomshini, uhlobo lwe-vacuum adsorption, uhlobo lwe-electromagnetic adsorption, uhlobo lwe-electrostatic adsorption nezinye izinhlobo.Ama-wafer chuck ahlukene anezici ezihlukile kanye nobubanzi bokusebenza.

II.Isebenza kanjani i-wafer chuck

A. Isakhiwo se-wafer chuck
I-wafer chuck ivamise ukwakhiwa nge-gripper, positioner kanye ne-adjuster.I-clamper isetshenziselwa ukugoqa isicwecwana se-silicon noma ezinye izinto, i-positioner isetshenziselwa ukuthola indawo ye-silicon wafer noma ezinye izinto, futhi isilungisi sisetshenziselwa ukulungisa amapharamitha afana namandla okubamba kanye nokunemba kokuma.

B. Ukuhamba komsebenzi kwe-wafer chuck
Lapho usebenzisa i-wafer chuck ukuze icutshungulwe, beka kuqala ama-wafer e-silicon noma ezinye izinto ku-wafer chuck bese uzilungisa nge-clamper, bese uzibeka nge-positioner, futhi ekugcineni ulungise isilawuli ukuze uqinisekise ukuma nokuqiniswa kwamawafa e-silicon noma ezinye izinto. Ukuzinza kuhlangabezana nezidingo.Uma lezi zinyathelo seziqediwe, i-wafer chuck isilungele ukucutshungulwa.

Ngesikhathi sokucutshungulwa, i-wafer chuck iqinisekisa ikakhulukazi ikhwalithi yokucubungula ngokulawula amapharamitha afana namandla okubamba nokunemba kokuma.I-clamping force isho amandla asetshenziswa i-gripper kumawafa e-silicon noma ezinye izinto, futhi idinga ukulungiswa ngokuya ngobulukhuni kanye nezidingo zokucubungula zezinto ezithile.Ukunemba kokuma kubhekisela ekunembayo kwe-gripper ne-positioner, okudingeka ilungiswe ngokuya ngezidingo zokucubungula ukuze kuqinisekiswe ukunemba kokucubungula nokuphindaphinda.

C. Ukunemba nokuzinza kwe-wafer chuck
Ukunemba nokuzinza kwe-wafer chuck yizinto ezibalulekile ezithinta ikhwalithi yokucubungula.Ngokuvamile, ukunemba kwe-wafer chuck kudinga ukufinyelela izinga le-sub-micron, futhi kudinga ukuzinza okuhle nokuphindaphinda.Ukuze uqinisekise ukunemba nokuzinza kwe-wafer chuck, ukucutshungulwa okunemba okuphezulu nokukhethwa kwezinto ezibonakalayo kuvame ukusetshenziswa, futhi ukugcinwa nokugcinwa okuvamile kwenziwa ku-wafer chuck.

III.Inkambu yohlelo lokusebenza ye-wafer chuck
Njengesisetshenziswa esibalulekile sokucubungula, i-wafer chuck isetshenziswa kabanzi ekwenziweni kwe-semiconductor, ukukhiqiza isibonisi sephaneli eyisicaba, ukukhiqizwa kwamaphaneli elanga kanye nezinkambu ze-biomedical.

A. Ukukhiqizwa kwe-semiconductor
Ekwenziweni kwe-semiconductor, i-wafer chuck isetshenziswa kakhulu ekucubunguleni izinqubo ezifana nokusika nokupakishwa kwama-semiconductor chips.Njengoba izidingo zokucubungula zama-semiconductor chips ziphezulu kakhulu, izidingo zokunemba nokuzinza kwe-wafer chuck nazo ziphezulu kakhulu.

B. Ukwenziwa Kwezibonisi Zephaneli Eyisicaba
Ekwenziweni kwesibonisi sephaneli eyisicaba, i-wafer chuck isetshenziswa kakhulu enqubweni yokukhiqiza yamadivayisi anjenge-liquid crystal display kanye nama-organic light emitting diode (OLEDs).Njengoba izidingo zokucubungula zalawa madivayisi wokubonisa ziphezulu kakhulu, izidingo zokunemba nokuzinza kwe-wafer chuck nazo ziphezulu kakhulu.

C. Ukukhiqizwa kwamaphaneli elanga
Ekwenziweni kwamaphaneli elanga, i-wafer chuck isetshenziswa kakhulu ekusikeni nasekucubunguleni ama-wafer e-silicon.Njengoba izidingo zokucubungula ama-wafers e-silicon ziphezulu kakhulu, izidingo zokunemba nokuzinza kwe-wafer chuck nazo ziphezulu kakhulu.

D. Inkambu ye-Biomedical
Emkhakheni we-biomedicine, i-wafer chuck isetshenziswa kakhulu ekwenzeni nasekucubunguleni ama-biochips.I-biochip iyithuluzi elincane elisetshenziselwa ukuthola ulwazi lwebhayoloji njengama-biomolecules namaseli, futhi inezidingo eziphakeme kakhulu zokunemba nokuzinza kwe-wafer chuck.I.

VI.Amathemba emakethe kanye nokuthuthuka komkhuba we-wafer chuck
A. Uhlolojikelele lwemakethe ye-wafer chuck yomhlaba wonke
Ngokuthuthuka okuqhubekayo kwezimboni ezifana nama-semiconductors, izibonisi zamaphaneli ayisicaba, namaphaneli elanga, imakethe ye-wafer chuck ikhombisa inkambiso yokukhula okuzinzile.Ngokwemininingwane evela ezinkampanini zocwaningo lwemakethe, kusukela ngo-2021, imakethe ye-wafer chuck yomhlaba wonke yeqe ama-US$2 webhiliyoni.Phakathi kwazo, isifunda sase-Asia-Pacific siyimakethe enkulu kunazo zonke ye-wafer chuck, futhi izimakethe zaseNyakatho Melika naseYurophu nazo ziyakhula.

B. Umkhuba wokuthuthukiswa kobuchwepheshe be-wafer chuck
Ngokuthuthuka okuqhubekayo kwemboni ye-semiconductor, izidingo zokunemba nokuzinza kwe-wafer chuck ziya ngokuya zikhuphuka.Ukuze kuhlangatshezwane nesidingo semakethe, ukwakhiwa kwama-wafer chucks kudinga ukuhlola njalo ubuchwepheshe obusha nezinto zokwakha, njengokusebenzisa ubuchwepheshe be-magnetic levitation ukuze kuthuthukiswe ukuzinza kwama-wafer chucks, kusetshenziswa izinto ezintsha ukuze kuthuthukiswe ukumelana nokugqwala kwama-wafer chucks, nokunye. .

Ngaphezu kwalokho, ngokuthuthuka okusheshayo kwenkambu ye-biomedical, isidingo sokufaka isicelo se-wafer chuck siyakhula.Ngokuzayo, ukukhiqizwa kwe-wafer chuck kuzobonisa amathuba emakethe amaningi emikhakheni esafufusa njengama-biochips.

C. Ukunwetshwa kwenkambu yokusetshenziswa kwe-wafer chuck
Ngokuthuthukiswa kobuchwepheshe obusha obunjengobuhlakani bokwenziwa kanye ne-5G, kuza umjikelezo omusha wenguquko kwezobuchwepheshe.Inkambu yesicelo se-wafer chuck izophinde inwebe iye ezinkambini ezisafufusa.Isibonelo, emkhakheni wobuhlakani bokwenziwa, i-wafer chuck ingasetshenziswa ukwenza ama-chips obuhlakani bokwenziwa, inikeze ukwesekwa okuqinile kokuthuthukiswa kobuchwepheshe bobuhlakani bokwenziwa.Emkhakheni we-5G, i-wafer chuck ingasetshenziswa ukwenza ama-antenna chips ukuthuthukisa isivinini sokudlulisela nokuzinza kwamanethiwekhi e-5G.

V.Inqubo yokukhiqiza ye-wafer chuck

A. Ukukhetha okubalulekile kwe-wafer chuck
Izinto zokwakha ze-wafer chuck zifaka izinto ezahlukahlukene ezifana nezinsimbi, i-ceramics, nama-polymers.Izinto ezihlukene zinezakhiwo ezihlukene kanye nobubanzi bokusebenza, futhi kuyadingeka ukukhetha izinto ezifanele ngokuya ngezidingo ezithile zohlelo lokusebenza.Isibonelo, lapho kukhiqizwa ama-wafer chucks anezinga lokushisa eliphezulu, izinto ezisetshenziswa ngokuvamile zihlanganisa ama-alloys asezingeni eliphezulu, izitsha zobumba, njll., futhi lezi zinto zinezinto ezingcono zokumelana nezinga lokushisa eliphezulu.

B. Inqubo yokukhiqiza ye-wafer chuck
Inqubo yokukhiqiza i-wafer chuck ikakhulukazi ihlanganisa izixhumanisi eziningi njengokukhethwa kwezinto ezibonakalayo, ukucutshungulwa, nokuphathwa kwendawo.Phakathi kwazo, isixhumanisi sokucubungula siyisixhumanisi esibucayi kakhulu, okuhlanganisa ukucutshungulwa kwe-CNC, ukupholisha, ukufutha nezinye izindlela zokucubungula.Lezi zindlela zokucubungula zingathuthukisa ngempumelelo ukunemba kokucubungula kanye nokushelela kwendawo ye-wafer chuck.Ngaphezu kwalokho, isixhumanisi sokwelashwa okungaphezulu sibaluleke kakhulu.Ngokwelapha ingaphezulu le-wafer chuck, indawo yayo engaphezulu ingathuthukiswa futhi ukugoqa kwendawo kungancishiswa, ngaleyo ndlela kuthuthukiswe amandla okubamba kanye nokubeka kahle kwe-wafer chuck.

C. Ukulawulwa kwekhwalithi ye-wafer chuck
Ukulawulwa kwekhwalithi ye-wafer chuck kuyisixhumanisi esibalulekile enqubweni yokukhiqiza, engaqinisekisa ukuzinza nokunemba kwe-wafer chuck.Izinhlobonhlobo zezindlela zokulawula ikhwalithi zivame ukudingeka ukuze kuqinisekiswe ikhwalithi ye-wafer chuck, okuhlanganisa ukulawula imingcele ehlukahlukene enqubweni yokukhiqiza, ukuhlola ukunemba kobukhulu, ukuhwalala komhlaba, kanye nokucaba kwendawo yomkhiqizo.

VII.Ukunakekelwa nokugcinwa kwe-wafer chuck
A. Ukunakekelwa kwansuku zonke kwe-wafer chuck
Ukunakekelwa kwansuku zonke kwe-wafer chuck ikakhulukazi kuhlanganisa ukuhlanzwa, ukuhlolwa nokulungiswa.Kunconywa ukuhlanza njalo uthuli nokungcola ebusweni be-wafer chuck, futhi uhlole isimo sokusebenza se-gripper ne-positioner.Ngesikhathi esifanayo, amandla okubamba kanye nokunemba kokuma kwe-wafer chuck kufanele kulinganiswe njalo ukuze kuqinisekiswe ukuqina nokusebenza kwayo nokunemba.

B. Ukugcinwa njalo kwe-wafer chuck
Ukugcinwa okuvamile kwe-wafer chuck ikakhulukazi kufaka phakathi ukushintsha izingxenye ezigugile kanye nokuhlola amapharamitha ahlukahlukene.Kunconywa ukuthi ushintshe izingxenye zokugqoka ezifana ne-gripper ne-positioner njalo, futhi uhlole izinguquko zamapharamitha ahlukahlukene.Ngaphezu kwalokho, ukugcinwa nokugcinwa njalo kuyadingeka ukuze kunwetshwe impilo ye-wafer chuck.

C. Wafer chuck ukuxazulula inkinga nokulungisa
Ukuxazulula inkinga nokulungisa i-wafer chuck kuyadingeka ukuze kuqinisekiswe ukusebenza kahle kwe-wafer chuck.Lapho i-wafer chuck ihluleka, ukuhlolwa okuphelele nokulungiswa kufanele kwenziwe ngokushesha, futhi indlela yokulungisa ehambisanayo kufanele ikhethwe ngokuya ngohlobo lokwehluleka.Abakhiqizi bemishini baphinde bahlinzeke ngezinsizakalo zokulungisa nokulungisa, ukuze abasebenzisi bakwazi ukuzilungisa ngesikhathi lapho ziphuka.

VII.Isiphetho
Lesi sihloko sethula kakhulu umqondo oyisisekelo, umgomo wokusebenza, inkambu yesicelo, ithemba lemakethe kanye nomkhuba wokuthuthuka, inqubo yokukhiqiza, ukunakekelwa kanye nezinye izici ze-wafer chuck.Ngokwethulwa kwe-wafer chuck, singabona ukuthi iyithuluzi elibalulekile emikhakheni eminingi efana nokukhiqizwa kwe-semiconductor, ukukhiqizwa kwamaphaneli ayisicaba, ukukhiqizwa kwamaphaneli elanga, kanye nezinkambu ze-biomedical.Ngaso leso sikhathi, ngokuthuthuka okuqhubekayo kobuchwepheshe, inkambu yokusetshenziswa kwe-wafer chuck izonwetshwa futhi, futhi inqubo yokukhiqiza nayo izothuthukiswa ngokuqhubekayo.Ngakho-ke, i-wafer chuck izodlala indima ebalulekile emikhakheni eminingi ngokuzayo.Ngaphezu kwalokho, lapho usebenzisa i-wafer chuck, kuyadingeka ukuthi unake ukulungiswa, ubuyisele izingxenye ezilimele ngesikhathi, futhi ugcine ukuzinza nokunemba ukuze kuqinisekiswe ukusebenza kahle kokukhiqiza kanye nekhwalithi yomkhiqizo.Ngokukhula okuqhubekayo kwemakethe ye-wafer chuck, kuyadingeka ukuqinisa imizamo yocwaningo nentuthuko futhi kwethulwe imikhiqizo ethuthuke kakhulu, esebenza kahle futhi ethembekile ukuze ihlangabezane nesidingo semakethe.Ngamafuphi, i-wafer chuck, njengesisetshenziswa esibalulekile esiwusizo ekucubunguleni i-semiconductor neminye imikhakha, izodlala indima ebaluleke kakhulu esikhathini esizayo.

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