Taw qhia rau lub tswv yim yooj yim, txoj cai ua haujlwm thiab daim ntawv thov ntawm Wafer Chuck

I. Basic tswvyim ntawm wafer chuck

A. Kev txhais ntawm wafer chuck
Wafer chuck yog ib yam khoom siv los clamp silicon wafers, nyias zaj duab xis thiab lwm yam ntaub ntawv los xyuas kom meej lawv stability thiab precision thaum lub sij hawm ua.Nws feem ntau muaj grippers, positioners, thiab adjusters, uas muaj peev xwm tuav thiab tso silicon wafers thiab films ntawm ntau qhov ntau thiab tsawg, duab, thiab cov ntaub ntawv.

B. Kev siv wafer chuck
Wafer chucks yog dav siv nyob rau hauv semiconductor manufacturing, optical processing, tiaj vaj huam sib luag zaub manufacturing, hnub ci vaj huam sib luag tsim, biomedicine thiab lwm yam teb rau clamp thiab txoj hauj lwm silicon wafers, nyias films thiab lwm yam ntaub ntawv los xyuas kom meej lawv stability thiab stability thaum ua precision.

C. Hom wafer chuck

Raws li cov xwm txheej sib txawv thiab cov kev xav tau, wafer chuck tuaj yeem muab faib ua cov cuab yeej clamping, hom nqus adsorption, electromagnetic adsorption type, electrostatic adsorption type thiab lwm yam.Cov wafer chucks sib txawv muaj cov yam ntxwv sib txawv thiab cov peev txheej ntawm daim ntawv thov.

II.Yuav ua li cas lub wafer chuck ua haujlwm

A. Cov qauv ntawm wafer chuck
Wafer chuck feem ntau yog tsim los ntawm gripper, positioner thiab adjuster.Lub clamper yog siv los clamp lub silicon wafer los yog lwm yam ntaub ntawv, lub positioner yog siv los nrhiav txoj hauj lwm ntawm silicon wafer los yog lwm yam ntaub ntawv, thiab lub adjuster yog siv los kho qhov tsis xws li clamping quab yuam thiab qhov chaw raug.

B. Kev ua haujlwm ntawm wafer chuck
Thaum siv lub wafer chuck rau kev ua, thawj qhov chaw silicon wafers los yog lwm yam ntaub ntawv ntawm lub wafer chuck thiab kho lawv nrog ib tug clamper, ces muab tso rau lawv nrog ib tug positioner, thiab thaum kawg kho tus regulator los xyuas kom meej txoj hauj lwm thiab clamping ntawm silicon wafers los yog lwm yam ntaub ntawv. Sustainability ua tau raws li qhov yuav tsum tau ua.Thaum cov kauj ruam no ua tiav, lub wafer chuck yog npaj txhij.

Thaum lub sij hawm ua, lub wafer chuck tsuas yog ua kom cov kev ua tau zoo los ntawm kev tswj tsis tau xws li clamping quab yuam thiab qhov chaw raug.Clamping quab yuam yog hais txog lub zog quab yuam los ntawm lub gripper ntawm silicon wafers los yog lwm yam ntaub ntawv, thiab nws yuav tsum tau kho raws li hardness thiab ua raws li cov kev cai ntawm cov ntaub ntawv tshwj xeeb.Positioning raug yog hais txog qhov tseeb ntawm lub gripper thiab positioner, uas yuav tsum tau hloov kho raws li cov kev xav tau los xyuas kom meej cov khoom raug thiab repeatability.

C. Qhov tseeb thiab ruaj khov ntawm wafer chuck
Lub precision thiab ruaj khov ntawm wafer chuck yog cov tseem ceeb cuam tshuam rau kev ua haujlwm zoo.Feem ntau, qhov tseeb ntawm wafer chuck yuav tsum tau mus txog qib sub-micron, thiab nws yuav tsum muaj kev ruaj ntseg zoo thiab rov ua dua.Txhawm rau kom ntseeg tau tias qhov tseeb thiab ruaj khov ntawm wafer chuck, kev ua haujlwm siab thiab xaiv cov khoom siv feem ntau yog siv, thiab kev tu thiab tu tsis tu ncua yog nqa tawm ntawm wafer chuck.

III.Daim ntawv thov teb ntawm wafer chuck
Raws li cov khoom siv tseem ceeb, wafer chuck yog siv dav hauv kev tsim khoom semiconductor, vaj huam sib luag vaj huam sib luag tsim, kev tsim vaj huam sib luag hnub ci thiab biomedical teb.

A. Kev tsim khoom semiconductor
Hauv kev tsim khoom semiconductor, wafer chuck feem ntau yog siv los ua cov txheej txheem xws li txiav thiab ntim cov khoom siv semiconductor.Txij li thaum cov kev cai ntawm cov semiconductor chips yog siab heev, cov precision thiab stability yuav tsum tau ntawm wafer chuck kuj siab heev.

B. Pav Vaj Huam Sib Luag Zaub Manufacturing
Hauv kev tsim vaj huam sib luag vaj huam sib luag, wafer chuck feem ntau yog siv rau hauv kev tsim cov khoom siv xws li cov kua siv lead ua kua thiab cov organic teeb emitting diodes (OLEDs).Txij li thaum cov txheej txheem ua tiav ntawm cov khoom siv no yog siab heev, qhov yuav tsum tau ua thiab kev ruaj ntseg rau cov wafer chuck kuj siab heev.

C. Solar panel manufacturing
Hauv kev tsim vaj huam sib luag hnub ci, wafer chuck feem ntau yog siv hauv kev txiav thiab ua cov silicon wafers.Txij li thaum cov txheej txheem ua tiav ntawm silicon wafers siab heev, qhov kev xav tau thiab kev ruaj ntseg ntawm cov wafer chuck kuj siab heev.

D. Biomedical teb
Hauv kev lag luam biomedicine, wafer chuck feem ntau yog siv rau hauv kev tsim thiab ua cov biochips.Lub biochip yog ib qho khoom siv me me uas siv los txheeb xyuas cov ntaub ntawv lom neeg xws li biomolecules thiab hlwb, thiab muaj cov kev xav tau siab heev rau qhov raug thiab ruaj khov ntawm wafer chuck.I.

VI.Kev lag luam zeem muag thiab kev loj hlob ntawm wafer chuck
A. Txheej txheem cej luam ntawm lub ntiaj teb no wafer chuck lag luam
Nrog rau kev txhim kho txuas ntxiv ntawm kev lag luam xws li semiconductors, vaj huam sib luag vaj huam sib luag, thiab hnub ci vaj huam sib luag, wafer chuck kev lag luam tau qhia txog kev loj hlob tsis tu ncua.Raws li cov ntaub ntawv los ntawm cov tuam txhab tshawb fawb kev lag luam, txij li xyoo 2021, kev lag luam thoob ntiaj teb wafer chuck tau tshaj US $ 2 billion.Ntawm lawv, thaj av Asia-Pacific yog lub lag luam loj tshaj plaws wafer chuck, thiab North American thiab European kev lag luam tseem loj hlob.

B. Technology txoj kev loj hlob ntawm wafer chuck
Nrog rau kev txhim kho txuas ntxiv ntawm kev lag luam semiconductor, qhov yuav tsum tau ua rau qhov raug thiab ruaj khov ntawm wafer chuck tau nce siab dua.Txhawm rau ua kom tau raws li kev xav tau ntawm kev lag luam, kev tsim cov wafer chucks yuav tsum tau tshawb nrhiav cov thev naus laus zis tshiab thiab cov ntaub ntawv, xws li siv cov tshuab sib nqus levitation los txhim kho kev ruaj ntseg ntawm wafer chucks, siv cov ntaub ntawv tshiab los txhim kho corrosion kuj ntawm wafer chucks, thiab lwm yam. .

Tsis tas li ntawd, nrog rau kev loj hlob sai ntawm biomedical teb, daim ntawv thov kev thov rau wafer chuck tseem nce ntxiv.Nyob rau hauv lub neej yav tom ntej, wafer chuck manufacturing yuav qhia ntau lub hauv kev lag luam hauv cov teb tshiab xws li biochips.

C. Kev nthuav dav ntawm daim ntawv thov teb ntawm wafer chuck
Nrog rau kev txhim kho cov thev naus laus zis tshiab xws li kev txawj ntse txawj ntse thiab 5G, kev hloov pauv thev naus laus zis tshiab tau los.Daim ntawv thov teb ntawm wafer chuck tseem yuav nthuav mus rau ntau qhov chaw tawm tshiab.Piv txwv li, nyob rau hauv lub tshav pob ntawm kev txawj ntse txawj ntse, wafer chuck tuaj yeem siv los tsim cov txuj ci kev txawj ntse, muab kev txhawb zog rau kev tsim cov cuab yeej txawj ntse.Hauv thaj tsam ntawm 5G, wafer chuck tuaj yeem siv los tsim cov kav hlau txais xov chips txhawm rau txhim kho kev sib kis ceev thiab ruaj khov ntawm 5G tes hauj lwm.

V.Manufacturing txheej txheem ntawm wafer chuck

A. Cov khoom xaiv ntawm wafer chuck
Cov khoom tsim ntawm wafer chuck muaj ntau yam ntaub ntawv xws li hlau, ceramics, thiab polymers.Cov ntaub ntawv sib txawv muaj cov khoom sib txawv thiab kev siv ntau yam, thiab yuav tsum xaiv cov ntaub ntawv tsim nyog raws li kev thov tshwj xeeb.Piv txwv li, thaum tsim high-temperature wafer chucks, feem ntau siv cov ntaub ntawv muaj xws li high-temperature alloys, ceramics, thiab lwm yam., thiab cov ntaub ntawv no muaj zoo dua kub-resistant zog.

B. Kev tsim cov txheej txheem ntawm wafer chuck
Cov txheej txheem tsim khoom ntawm wafer chuck feem ntau suav nrog ntau qhov sib txuas xws li xaiv cov khoom siv, ua, thiab kho qhov chaw.Ntawm lawv, kev sib txuas ua haujlwm yog qhov tseem ceeb tshaj plaws, suav nrog CNC machining, polishing, txau thiab lwm txoj hauv kev.Cov txheej txheem kev ua haujlwm no tuaj yeem txhim kho qhov ua tau zoo thiab qhov du du ntawm wafer chuck.Tsis tas li ntawd, qhov txuas kho qhov chaw kuj tseem ceeb heev.Los ntawm kev kho qhov saum npoo ntawm wafer chuck, nws qhov chaw tiav tuaj yeem txhim kho thiab qhov roughness ntawm qhov chaw tuaj yeem raug txo, yog li txhim kho lub clamping quab yuam thiab qhov chaw raug ntawm wafer chuck.

C. Kev tswj zoo ntawm wafer chuck
Kev tswj xyuas zoo ntawm wafer chuck yog qhov tseem ceeb txuas hauv cov txheej txheem tsim khoom, uas tuaj yeem ua kom muaj kev ruaj ntseg thiab meej ntawm wafer chuck.Ntau yam kev tswj xyuas zoo feem ntau yuav tsum tau ua kom ntseeg tau qhov zoo ntawm wafer chuck, nrog rau kev tswj ntau yam tsis muaj nyob hauv cov txheej txheem tsim khoom, kuaj qhov tseeb qhov tseeb, qhov roughness, thiab qhov chaw tiaj tus ntawm cov khoom.

VII.Kev saib xyuas thiab kev saib xyuas ntawm wafer chuck
A. Kev tu txhua hnub ntawm wafer chuck
Kev tu txhua hnub ntawm wafer chuck feem ntau suav nrog kev tu, tshuaj xyuas thiab kev hloov kho.Nws raug nquahu kom tsis tu ncua ntxuav cov plua plav thiab impurities ntawm qhov chaw ntawm lub wafer chuck, thiab xyuas qhov ua haujlwm ntawm lub gripper thiab positioner.Nyob rau tib lub sijhawm, lub zog clamping thiab qhov chaw raug ntawm lub wafer chuck yuav tsum tau ntsuas tsis tu ncua kom ntseeg tau tias nws ua haujlwm ruaj khov thiab raug.

B. Kev saib xyuas tsis tu ncua ntawm wafer chuck
Kev saib xyuas tsis tu ncua ntawm wafer chuck feem ntau suav nrog kev hloov cov khoom hnav thiab tshuaj xyuas ntau yam tsis muaj.Nws raug nquahu kom hloov cov khoom hnav xws li gripper thiab positioner tsis tu ncua, thiab xyuas cov kev hloov pauv ntawm ntau yam.Tsis tas li ntawd, kev tu thiab tu tsis tu ncua yuav tsum tau ua kom lub neej ntev ntawm wafer chuck.

C. Wafer chuck daws teeb meem thiab kho
Kev daws teeb meem ntawm wafer chuck yog tsim nyog los xyuas kom meej tias kev ua haujlwm ntawm wafer chuck kom raug.Thaum lub wafer chuck tsis ua haujlwm, kev tshuaj xyuas thiab kev kho yuav tsum tau ua tam sim ntawd, thiab cov txheej txheem kho yuav tsum raug xaiv raws li hom tsis ua haujlwm.Cov tuam txhab tsim khoom kuj tseem muab kev kho thiab tu cov kev pabcuam, kom cov neeg siv tuaj yeem kho lawv lub sijhawm thaum lawv tawg.

VII.Xaus
Kab lus no tsuas yog qhia txog cov ntsiab lus yooj yim, cov ntsiab lus ua haujlwm, daim ntawv thov teb, kev cia siab ntawm kev lag luam thiab kev txhim kho, kev tsim khoom, kev saib xyuas thiab lwm yam ntawm wafer chuck.Los ntawm kev qhia txog wafer chuck, peb tuaj yeem pom tias nws yog ib qho khoom siv tsis tseem ceeb hauv ntau qhov chaw xws li kev tsim khoom semiconductor, vaj huam sib luag vaj huam sib luag tsim, kev tsim vaj huam sib luag hnub ci, thiab biomedical fields.Nyob rau tib lub sijhawm, nrog kev nce qib ntawm cov thev naus laus zis tsis tu ncua, daim ntawv thov kev lag luam ntawm wafer chuck yuav nthuav dav ntxiv, thiab cov txheej txheem tsim khoom kuj tseem yuav txhim kho tsis tu ncua.Yog li ntawd, wafer chuck yuav ua lub luag haujlwm tseem ceeb hauv ntau thaj chaw yav tom ntej.Tsis tas li ntawd, thaum siv lub wafer chuck, nws yog ib qho tsim nyog yuav tsum tau them sai sai rau kev saib xyuas, hloov cov khoom puas hauv lub sijhawm, thiab tswj nws txoj kev ruaj ntseg thiab qhov tseeb kom paub tseeb tias cov khoom siv tau zoo thiab cov khoom zoo.Nrog rau kev nthuav dav txuas ntxiv ntawm wafer chuck kev ua lag luam, nws yog ib qho tsim nyog los ntxiv dag zog rau kev tshawb fawb thiab kev tsim kho thiab tsim cov khoom lag luam siab dua, muaj txiaj ntsig thiab txhim khu kev qha kom tau raws li kev xav tau ntawm kev lag luam.Nyob rau hauv luv luv, wafer chuck, raws li ib tug tseem ceeb auxiliary cuab yeej nyob rau hauv semiconductor ua thiab lwm yam teb, yuav ua si lub luag hauj lwm tseem ceeb nyob rau hauv lub neej yav tom ntej.

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